Facilities > QEMM equipments
Sputtering is a technique used to deposit thin films of a material onto a surface. By first creating a gaseous plasma and then accelerating the ions from this plasma into some source material, the source material is eroded by the arriving ions via energy transfer and is ejected in the form of neutral particles - either individual atoms, clusters of atoms or molecules. As these neutral particles are ejected they will travel in a straight line unless they come into contact with something - other particles or a nearby surface. If a "substrate" such as a Si wafer is placed in the path of these ejected particles it will be coated by a thin film of the source material.
WHAT IS PLD?
The technique of PLD (Pulsed Laser Deposition) has been used to deposit high quality films of materials for more than a decade. The technique uses high power laser pulses to melt, evaporate and ionize material from the surface of a target. This "ablation" event produces a transient, highly luminous plasma plume that expands rapidly away from the target surface. The ablated material is collected on an appropriately placed substrate upon which it condenses and the thin film grows.
In physics the Magneto-Optic Kerr Effect (MOKE) or the Surface Magneto-Optic Kerr Effect (SMOKE) is one of the magneto-optic effects. It describes the changes to light reflected from a magnetised surface. It is used in materials science research in devices such as the Kerr microscope, to investigate the magnetization structure of materials.
The electrical test probe station is for semiconductor device characterization and analysis at ambient environment. Its semiconductor parameter analyzer has standard test routines for p-n junctions, CMOS, MOSFET, diodes etc.